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Model 1164 / PLR,WLR Reliability test system
반도체 신뢰성 평가 설비
l EM, Electromigration test
l SM, Stress Migration test
l Copper ILD leakage Current test
l Constant Voltage TDDB test
l BTS-Bias Temperature Stress test
l SILC- stress included leakage current
for thin Gate Oxide test
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l HCI, Hot Carrier injection test
l Vt Stability test
l NBTI test
l BJT, Bipolar Hot Carrier (Bipolar HCI) test
l Dielectric Leakage Current test
l Solder Ball, Bump em, TSV test
l C4, Flip-Chip, Cu pillar test |
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