Model 1164 / PLR,WLR Reliability test system

반도체 신뢰성 평가 설비

 

 

l  EM, Electromigration test

l  SM, Stress Migration test

l  Copper ILD leakage Current test

l  Constant Voltage TDDB test

l  BTS-Bias Temperature Stress test

l  SILC- stress included leakage current

for thin Gate Oxide test

 

 

l  HCI, Hot Carrier injection test

l  Vt Stability test

l  NBTI test

l  BJT, Bipolar Hot Carrier (Bipolar HCI) test

l  Dielectric Leakage Current test

l  Solder Ball, Bump em, TSV test

l  C4, Flip-Chip, Cu pillar test

 

 

 

 

 


 

 

 

 

 

 

 

 

 

 

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